Plan Optik and 4JET cooperate
- Process innovation for through-glass vias in the field of advanced packaging
- Premiere at Touch Taiwan on April 19-21 in Taipei
Elsoff, Alsdorf, 04.04.2023. Plan Optik AG (Elsoff, Germany) and 4JET microtech (Alsdorf, Germany) have jointly developed a process chain for the highly productive production of metallized through-glass vias.
The new VLIS process (short for Volume Laser Induced Structuring) enables the production of high-precision TGV („Through Glass Vias“) for advanced packaging in glass wafers, or substrates for displays.
TGV are micro-holes with a diameter of typically 10µm to 100µm. For various applications in the advanced packaging sector, tens of thousands of these vias are applied per wafer and metallized to produce the required conductivity. TGVs are also used in the manufacture of displays, for example based on µLED. Previous methods for manufacturing were slow, associated with high reject rates and difficult to match to the metallization process.
The teams from both companies have now developed a solution that can prepare several 10,000 vias per minute, which are etched in a subsequent batch process to be coated afterwards. The resulting channels are positioned with a hole-to-hole accuracy better than +/- 2µm. The substrates are free of microcracks, and the insides of the channels are smooth-walled and can be homogeneously metallized. The process is suitable for glass types typical in the semiconductor and display industry. In addition to glass starting thicknesses of 100µm, various copper layers down to 25µm thickness can be realized.
The two partners have agreed on a cooperation that provides users with a high degree of flexibility: Customers can either purchase components produced with VLIS from Plan Optik, or purchase qualified total solutions for system technology including laser systems, wet chemistry and metallization from 4JET and partners.
Plan Optik already has a modern production chain for the manufacture of glass wafers and masters all process steps from wafer cutting and edge processing, through structuring and cleaning, to metallization. The addition of 4JET’s system technology now enables the rapid and positionally accurate modification of substrates. A modified version of the proven 4JET laser systems for cutting glass is used. The PEARL platform is already used for cutting glass substrates in display, architectural glass, or medical technology. Depending on the version, the systems are capable of high-precision modification of glass up to 2.2 m wide and more than 3 m long.
A new technology
The use of laser technology for selective etching is not new, but overall the cooperation delivers significant advances for customers: the combination with Plan Optik AG’s extensive process chain creates the world’s leading solution chain for fully processed and metallized TGV wafers. At the same time, the precision, speed and availability now achievable on very large substrates enables application in display manufacturing for the first time.
The two partners see further potential for the VLIS process for glass-based MEMS, microfluidics or high-frequency antenna technology (e.g. 6G).
The PEARL systems are based on a granite machine platform that offers inherent accuracy and long-term stability. Cutting geometries and positions for interposers can be easily imported from CAD drawings. Targeted tuning of axis controls results not only in high cutting speed, but also in excellent path accuracy to achieve high-precision machining. The PEARL DYNAMIC FOCUS ensures that the focus is always within the process window without increasing the process time.
For more information, visit > vlis.tech.
Plan Optik AG
As a technology leader, Plan Optik AG produces structured wafers at sites in Germany and Hungary. These wafers are used as active elements for numerous applications in sectors such as consumer electronics, automotive, aerospace, chemicals and pharmaceuticals.
4 Jet Group
The Alsdorf-based 4JET Group delivers solutions for the surface technology of the future. Customers include all of the world’s leading tire manufacturers, numerous automotive suppliers and OEMs, as well as the largest manufacturers of flat glass and thin-film photovoltaic cells.
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IR contact
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Stefan Thoma
PLANOPTIK AG
Ueber der Bitz 3
D-56479 Elsoff
Telefon: +49 2664 5068 52
Telefax: +49 2664 5068 91
E-Mail: investor.relations@planoptik.com
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Disclaimer Regarding Forward-Looking Statements
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The documents provided on this website contain statements related to our future business and financial performance and future events or developments involving PLANOPTIK that may constitute forward-looking statements. These statements may be identified by words such as „expect,“ „look forward to,“ „anticipate“ „intend,“ „plan,“ „believe,“ „seek,“ „estimate,“ „will,“ „project“ or words of similar meaning. We may also make forward-looking statements in other reports, in presentations, in material delivered to shareholders and in press releases. In addition, our representatives may from time to time make oral forward-looking statements. Such statements are based on the current expectations and certain assumptions of PLANOPTIK`s management, of which many are beyond PLANOPTIK´s control. These are subject to a number of risks, uncertainties and factors, which are described in our publications – in particular in the ‘Opportunities and Risks’ sections of the Management Report in the Annual Report and the Interim Management Report in the Half-Yearly Report – but are not limited to these. Should one or more of these risks or uncertainties materialize, or should underlying expectations not occur or assumptions prove incorrect, actual results, performance or achievements of PLANOPTIK may (negatively or positively) vary materially from those described explicitly or implicitly in the relevant forward-looking statement. PLANOPTIK neither intends, nor assumes any obligation, to update or revise these forward-looking statements in light of developments which differ from those anticipated.
This document is an English language translation of the German document. In case of discrepancies, the German language document is the sole authoritative and universally valid version. For technical reasons, there may be differences between the accounting records appearing in this document and those published pursuant to legal requirements.
The documents provided on this website contain statements related to our future business and financial performance and future events or developments involving PLANOPTIK that may constitute forward-looking statements. These statements may be identified by words such as „expect,“ „look forward to,“ „anticipate“ „intend,“ „plan,“ „believe,“ „seek,“ „estimate,“ „will,“ „project“ or words of similar meaning. We may also make forward-looking statements in other reports, in presentations, in material delivered to shareholders and in press releases. In addition, our representatives may from time to time make oral forward-looking statements. Such statements are based on the current expectations and certain assumptions of PLANOPTIK`s management, of which many are beyond PLANOPTIK´s control. These are subject to a number of risks, uncertainties and factors, which are described in our publications – in particular in the ‘Opportunities and Risks’ sections of the Management Report in the Annual Report and the Interim Management Report in the Half-Yearly Report – but are not limited to these. Should one or more of these risks or uncertainties materialize, or should underlying expectations not occur or assumptions prove incorrect, actual results, performance or achievements of PLANOPTIK may (negatively or positively) vary materially from those described explicitly or implicitly in the relevant forward-looking statement. PLANOPTIK neither intends, nor assumes any obligation, to update or revise these forward-looking statements in light of developments which differ from those anticipated.
This document is an English language translation of the German document. In case of discrepancies, the German language document is the sole authoritative and universally valid version. For technical reasons, there may be differences between the accounting records appearing in this document and those published pursuant to legal requirements.