What are MEMS Microphones? MEMS Microphones are crafted using the advanced MEMS (Microelectromechanical systems) technologies. The heart of a MEMS Microphone is the sound sensing element, primarily formed from a silicon device wafer, which is further enclosed by a top-tier borosilicate glass wafer. How do MEMS Microphones work? Within the silicon device wafer lies a…
What are MEMS Gyroscopes? MEMS Gyroscopes are used for the detection of yaw-rate respectively angular-rate. They are manufactured by using MEMS (Microelectromechanical systems) technologies. The core part of a MEMS Gyroscope is an angular-rate sensing die based on a silicon device wafer, encapsulated by a high quality borosilicate glass wafer. General process flow How do…
What are Adapter Carriers? Adapter Carriers are customized tools enabling processing of smaller sized substrates or device wafers on bigger sized equipment (e.g. 6 inch device wafer on 8 inch equipment). The carrier diameter and thickness is matched to existing process tools such as thinning, dry etching, coating, implant, metal deposition, probing, etc.. What materials…
What are Thin-Wafer-Handling Carriers? Thin-Wafer-Handling Carriers are tools that are used as Carriers in the manufacture of thin semiconductor wafers. Without the use of such Carriers, production and handling of very thin semiconductor wafers (down to approx. 50 microns) would be unthinkable. How do Thin-Wafer-Handling Carriers work? The device wafer is temporarily bonded to…
What are MEMS Pressure Sensors? MEMS Pressure Sensors are manufactured by using MEMS (Microelectromechanical systems) technologies. The core part of a MEMS Pressure Sensor is a pressure sensing die based on a silicon device wafer, encapsulated by a high quality borosilicate glass wafer. How do MEMS Pressure Sensors work? A membrane inside the silicon…
