Plan Optik manufactures wafers from various types of glass, quartz, alkaline free glass and glass-silicon compound materials. Tailored to customer specifications, Plan Optik’s glass wafers impress with an extremely high level of accuracy.
Plan Optik’s range of glass wafers
Featured Products
BOROSILICATE WAFER
– cte adapted to Silicon
– for anodic bonding
– standard or enhanced MDF (micro-damage-free) polishing
– high chemical resistance and thermal stability
QUARTZ WAFER
– very low OH and low trace metal content
– good chemical purity
– very high heat resistance
– surface roughness (Ra) < 0.5 nm
– transmission > 80% @ 200 nm
– transmission > 90% from 225 nm to 2600 nm
FUSED SILICA WAFER
– full synthetic material
– very low trace metal content
– high heat resistance
– surface roughness (Ra) < 0.5 nm
– transmission > 90% from 200 nm to 2000 nm
ALKALINE FREE WAFER
– alkaline free Glass
– cte adapted to Silicon
– no heavy metasl (as arsenic, antimony, barium or halides)
– low fluorescence
– excellent thermal properties
– high chemical resistance
SILICON ON GLASS WAFER (SOG)
– crystalline Silicon layer
– thick insulation layer or thick Silicon layer
– permanently bonded Silicon/Glass compound
– minimum single layer thickness down to 20 µm
– overall thickness down to 250 µm
Properties of the glass wafers at a glance
- various types of Glass and Quartz
- manufactured to custom specifications
- standard SEMI / JEIDA specifications from 2” to 300 mm
- panel size and custom diameter
- thickness from 200 µm to 2 mm
- low thickness tolerance and ttv (total thickness variation)
- high surface quality (surface roughness (Ra) max. < 1nm)
- large scale manufacturing available
Areas of application for glass wafers from Plan Optik
The advantages of glass as a wafer material are particularly evident in the field of microsystem technology. Industries such as consumer electronics, automotive and sensor technology are increasingly relying on the material glass for example for wafer-level packaging (WLP) or fan-out wafer level packaging (FOWLP) applications. Typical applications are:
As a leading wafer manufacturer, Plan Optik AG produces glass wafer for these growing markets. The wafers which are used for instance in driver assistance systems, motor controls or medical technology meet high standards in terms of thickness tolerance or surface quality. The unique glass wafer fabrication developed by Plan Optik as well as many years of experience in the field of glass processing enable the production of high quality wafers that exactly meet customer requirements.
If you have a product idea or a project please do not hesitate to contact us!
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