– straight, tapered or hourglass shaped through holes
– hole diameter from 50 microns
– high density
– combination with other patterning technologies available
– straight, tapered or hourglass shaped through holes
– hole diameter from 50 microns
– high density
– combination with other patterning technologies available
– optical cavities with transparent bottom
– cavity size from 20 microns
– deep cavities (up to 2 mm depth)
– cavities with high aspect ratio
– high density
– combination with other patterning technologies available
– mechanically patterned, lasered or wet-etched trenches and channels
– high aspect ratio available
– channel width from 20 microns
– deep channels (up to 2 mm depth)
– combination with other patterning technologies available